About: http://webisa.webdatacommons.org/262592681

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The plate is most advantageously made of a conductive material, such as aluminum or any reflective material and is patterned using reactive-ion-etch (RIE), chemical-mechanical polish (CMP) or lift-off process.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com