About: http://webisa.webdatacommons.org/262607017

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The invention applies especially to substrates intended to accommodate a microelectronics structure, such as a sensor, a magnetic head or a microactuator, or intended to accommodate a microelectronics circuit.
http://www.w3.org/ns/prov#wasQuotedFrom	google.de