| http://www.w3.org/ns/prov#value | - FIG. 15A is a top view of an EL module, and FIG. 15B is a sectional view taken along a line A???A??? of FIG. 15A. In FIG. 15A, on a film substrate 900 having an flexibility (for example, a plastic substrate, or the like), a film 901 having compression stress (for example a Oxidation silicon film) is provided, and a pixel portion 902, a source side driver circuit 904, and a gate side driver circuit
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