About: http://webisa.webdatacommons.org/263001983

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 4 is a graph that illustrates the effect of varying a flow rate of TMS in accordance with embodiments wherein a chemical vapor deposition (???CVD???) deposited film is e-beam treated;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com