About: http://webisa.webdatacommons.org/263130953

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 17 is a graph for comparing total times required for wet cleaning and ClF3 cleaning with each other;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com