About: http://webisa.webdatacommons.org/263135522

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 11 is a graph that shows nickel silicide phase formation as function of the temperature of the first anneal step and of the thickness of the polysilicon layer according to an example.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com