| http://www.w3.org/ns/prov#value | - FIG. 3A is a partial side view of an embodiment using an alternative sensor system; FIG. 3B is a top view of FIG. 3A; FIG. 4A is a top view of a wafer position error detection and correction system in accordance with the present invention; FIG. 4B illustrates the transfer of a wafer from a cassette to a transfer chamber through an input/output slit valve; FIG. 5A shows a condition where the wafer
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