About: http://webisa.webdatacommons.org/263364976

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	According to this invention, the trench under the signal lines can be opened in such as way that full or portion of the dielectric material can be removed, and opened trench's deepness and wideness are dependent on bandwidth requirement.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr