| http://www.w3.org/ns/prov#value | - As a result, the movable frame and thus the wafer stage 1 stop and no force of over 0.5 N acts on the wafer. [0039] The bridge leg portions 11 on which the base table 6, the wafer camera 10 and the probe card holder 9 are mounted are made of a natural stone, such as granite.
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