About: http://webisa.webdatacommons.org/263480571

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 10 shows the manufacturing flow of a microdevice (e.g., a semiconductor chip, such as an IC or LSI, a liquid crystal panel, a CCD, a thin-film magnetic head, a micromachine, or the like).
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr