| http://www.w3.org/ns/prov#value | - FIGS. 7A-7I illustrate cross-sectional views of a substrate material during the corresponding process steps in flowchart 28, while FIG. 7J illustrates a finished microneedle. [0049] It is anticipated that photolithography and other techniques developed for use in the semiconductor fabrication industry can be beneficially employed in fabricating individual microneedles and arrays of microneedles in
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