About: http://webisa.webdatacommons.org/263638410

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	plurality of devices communicating in a network, the devices including a metrology machine, a processing machine, and a controller.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com