About: http://webisa.webdatacommons.org/263855557

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Processes for preparing the inorganic insulative hole injecting layer include various physical and chemical thin-film forming processes such as sputtering, EB vapor deposition, and plasma CVD, with the sputtering being preferred.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com