About: http://webisa.webdatacommons.org/264016204

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Argon gas flowing between about 1,000 sccm and about 10,000 sccm, such as between about 3,000 sccm and about 6,000 sccm, is continuously provided.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au