| http://www.w3.org/ns/prov#value | - It is important that the first material layer is formed from a material with which a trouble such as peeling is not caused by heat treatment or laser light irradiation at the formation of the layer to be peeled and which has tensile stress at a range of 1 dyne/cm2 to 1???1010 dyne/cm2 immediately after the formation of the layer to be peeled.
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