About: http://webisa.webdatacommons.org/264196551

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	It is also preferable that an aromatic solvent, such as xylene, be employed for the development of the negative type resist layer 4 after the exposure pattern has been completed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com