About: http://webisa.webdatacommons.org/264314628

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Optionally also a further layer, for example to avoid surface roughening by blistering after a hydrogen or helium implantation, can be deposited on the layer structure.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com