About: http://webisa.webdatacommons.org/264509957

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Further, there is a need for an improved lithographic image evaluation technique and system that overcomes one, some or all of the conventional systems and techniques.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au