| http://www.w3.org/ns/prov#value | - In one embodiment,the support ring 210 functions as an edge ring and may be gravitationally attached to the annular extension 214 for easy removal and replacement.The support section 212 may be fabricated from a material that reduces potential scratching, chemical or physical contamination, and/or marring of the substrate, for example, materials such as silicon carbide, stainless steel, aluminum,
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