| http://www.w3.org/ns/prov#value | - In Embodiment 1, a 50 nm thick tungsten film, a 500 nm thick Al--Ti (alloy of aluminum and titanium) film, and a 30 nm thick titanium film are layered on the gate insulating film 307 in the order stated.Conductive materials for forming the first to third conductive films are elements selected from the group consisting of Ta, W, Ti, Mo, Al, and Cu, or alloy or compound materials mainly containing t
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