| http://www.w3.org/ns/prov#value | - Another embodiment of the present invention is a method of manufacturing a micropump, comprising a first etching of a first side of a silicon substrate to partially form a first side of a valve and a first side of a diaphragm; and a second etching of both said first side and a second side of said silicon substrate, such that said first side of said valve and said first side of said diaphragm are f
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