| http://www.w3.org/ns/prov#value | - In addition, in the present invention, the barrier layer is formed with two kinds of layers of an n-type impurity doped layer 701 and an undoped layer 702, however a layer with slope-like concentration change and a layer with stair-like concentration change is inserted between the two kinds of layers different in concentration of the n-type impurity, and the concentration is changed to also obtain
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