| http://www.w3.org/ns/prov#value | - DETAILED DESCRIPTION OF PREFERRED EMBODIMENT [0028] In the Figures, like numerals indicate like elements. [0029] The present invention is an apparatus and method for a micro-machined electromechanical system (MEMS) device having a hermetically sealed sensor or actuator device mechanism that is electrically interconnected by diffused conductive paths to a plurality of wire bond pads that are locate
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