About: http://webisa.webdatacommons.org/264884019

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	On the other hand, there are operations to be done by an operator, such as a work of opening a window of a chamber and unloading a wafer cassette, and a work of opening another window of the chamber and replacing a reticle by another.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com