| http://www.w3.org/ns/prov#value | - In FIG. 11, a plurality of holes 14???ai are formed in a grid at predetermined intervals in the electrode surface portion 14???E. Instead of the substantially cylindrical electrode terminals 24 ai as described above, touching surface portions 26T of solder-ball-attached contact terminals 26 ai (i=1 to n, n is a positive integer) are inserted into the respective holes 14???ai The gap between the ou
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