| http://www.w3.org/ns/prov#value | - An optical switching device array having M??N array of optical switching devices, wherein each of M and N is a positive integer and each of the optical switching devices comprises: a first actuator including a first membrane, a second membrane, a piezoelectric device formed on at least one of the first and second membranes, a first connecting part and a second connecting part, wherein the first co
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