| http://www.w3.org/ns/prov#value | - BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1A is a schematic block diagram of an exemplary embodiment of an irradiation system according to the present invention which irradiates particular areas of a semiconductor thin film of a sample such that these areas have a relatively small edge regions; FIG. 1B is an enlarged cross-sectional side view of the sample which includes the semiconductor thin film;
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