| http://www.w3.org/ns/prov#value | - In photochemical vapor deposition (chemical vapor deposition, which will be referred to as CVD hereafter), light energy such as a laser beam and an ultraviolet light is used as an energy source for CVD. An excimer laser or a carbon dioxide gas laser is generally employed as the laser, while a low-pressure mercury lamp, a high-pressure mercury lamp, or a deuterium lamp is used as an ultraviolet lig
|
