| http://www.w3.org/ns/prov#value | - In order to be practically useful, the X-ray transmitting membrane must satisfy various requirements including, for example, (1) resistance against irradiation with high-energy radiations such as high-energy electron beams, synchrotron radiation and the like, (2) high visible-light transmission of at least 50% to facilitate high-precision alignment of the mask, (3) good resistance against chemical
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