| http://www.w3.org/ns/prov#value | - n the adaptive optical element for narrowing a bandwidth of the laser beam to 0.6 pm or less, wherein the non-planar surface of the adaptive optical element has an adjustable contour, and wherein the laser system further comprises a detection and control system including a detector and a processor for monitoring a parameter of the laser beam indicative of a fitting of the contour of the adaptive o
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