| http://www.w3.org/ns/prov#value | - In order to achieve the above and other objects, the present invention deals with a method of fabricating diffraction gratings comprising a step for arranging a photomask on a substrate which is coated over its surface with a photoresist, a step for permitting incident light to fall thereon from the upper direction at an acute angle relative to the normal direction of the photomask, and a step for
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