About: http://webisa.webdatacommons.org/265369912

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In one embodiment, low-k dielectric 323 is a dielectric material deposited using the Flowfill??? dielectric deposition technology commercially available from Trikon Technologies of the United Kingdom (on the Internet: www.trikon.com).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com