| http://www.w3.org/ns/prov#value | - In the state with the XY stage 6 moved by the main control system 9 to bring the light receiver of the spatial image measurement apparatus near the position corresponding to one of the projected images of the first master identification marks M1, as shown in FIG. 9A, the aperture 54 of the light receiver is moved over (scans) the projected image 57, whereby a signal such as shown in FIG. 9B is det
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