| http://www.w3.org/ns/prov#value | - In general, the aim is to restrict the time necessary for providingsuch patterns as much as possible.It is an object of the invention to provide, inter alia, a method of the type described in the opening paragraph, which enables overlapping patterns to be rapidly and accurately formed on a substrate.For this purpose, a method of the type mentioned in the opening paragraph is characterized in that
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