| http://www.w3.org/ns/prov#value | - In particular, the actuator can include a serpentine arrangement of alternating actuating and opposing segments anchored at a first end thereof to the substrate wherein the actuating segments deflect in response to...http://www.google.com/patents/US6327855?utm_source=gb-gplus-sharePatent US6327855 - Actuators including serpentine arrangements of alternating actuating and opposing segments and rela
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