PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • In yet another embodiment, the related grating structures are all positioned within the device structure. [0052] The related grating structures are preferably formed in the same field and in close proximity to one another so as to minimize differences to properties other than the properties desired to be controlled so that they are formed with the same process conditions, from the same films, from
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