| http://www.w3.org/ns/prov#value | - In combination,a plate member having a planar front side and at least one through aperture that is adapted to have a wafer mounted therein, means including at least three spring-mounted retaining elements affixed to said plate member around the periphery of each aperture for applying radially directed holding forces to edge portions of a wafer introduced into the aperture from the back side of the
|
