| http://www.w3.org/ns/prov#value | - In a method of making a planar sensor element, the sensor element components, e.g., electrodes 12, 14, electrolyte 16, insulating layer(s) 30, 32, heater element 28, protective layers 18 and the like, are formed using techniques such as tape casting methods, sputtering, punching and placing, spraying (e.g., electrostatically spraying, slurry spraying, plasma spraying, and the like), dipping, paint
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