| http://www.w3.org/ns/prov#value | - In this embodiment, the door material 20 is any material that is known in the art or to be developed for use in slit valve or other chamber door applications, and preferably includes, at least partially or completely, a metal or metal alloy material, such as aluminum, anodized aluminum or stainless steel, and other similar materials.FIG. 2B illustrates the relationship of the seal member 16 to the
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