| http://www.w3.org/ns/prov#value | - On the heat insulation layer 1202, there are patterned the resistance layer 1203 (0.01-0.2 ??m thick) constituting the heat generating member and composed of hafnium boride (HfB2), tantalum nitride (TaN) or tantalum-aluminum (TaAl) and the wiring electrodes 1204, 1205 (0.2-1.0 ??m thick) composed for example of aluminum, as shown in FIG. 56B. The wiring electrodes 1204, 1205 apply a voltage to the
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