| http://www.w3.org/ns/prov#value | - In VLSI lithography, an image of the mask is recorded on the wafer???thus an EUV scanner step and scan projection camera including for example, a EUV source and condenser, mask, holder, lens, wafer holder, alignment system and wafer transport system is a tool that projects a 13.6 nm EUV image on a wafer coated with radiation sensitive resist. [0040] In metrology, the pattern on the mask is often u
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