PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • In oneexample, the aggregate thickness T.sub.Box of BOX layer 22 and barrier layer 26 (as well as any passivation layers, adhesion layers, or other layers that may be present) is between about 0.1 micron and about 1 microns, for example between about 0.15microns and about 0.5 microns, such as about 0.25 microns.Practical considerations that may limit the desirable minimum thickness of BOX layer 22
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