| http://www.w3.org/ns/prov#value | - One example of a possible gas treatment process includes introducing a reducing gas, for example, hydrogen, and optionally an inert gas, into the processing chamber at a total flow rate between about 500 sccm and about 3,000 sccm, such as between about 1,000 sccm and about 2,500 sccm of hydrogen, and generating a plasma in the processing chamber using a power density ranging between about 0.03 W/c
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