| http://www.w3.org/ns/prov#value | - ng reticle inspecting apparatus in the third aspect of the present invention.A reticle inspecting apparatus in a fourth aspect of the present inventionfor inspecting a reticle, fabricated by forming a pattern of an opaque or light-transmissive film on a transparent or translucent substrate, for defects, such as foreign particles adhering to the substrate, comprises: an inspection stage unitincludi
|
