| http://www.w3.org/ns/prov#value | - In order to cope with the above problem, Japanese Patent Laid-Open No. 7-183540 discloses a technology for preparing a semiconductor film having a crystalline structure by adding a metal element such as nickel that assists the crystallization of a semiconductor film, making it possible not only to lower the heating temperature necessary for the crystallization but also to enhance the orientation o
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