| http://www.w3.org/ns/prov#value | - And, etching is effected by using a known technique such as photolithography to remain required portions alone. [0164] Further processes are the same as those in the second embodiment; as shown in FIG. 17B, a film of polyparaxylirene is formed as the movable separation diaphragm 5, and, then, as shown in FIG. 17C, an SiN defining the joining member 130 b constituting the joining portion to the liq
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