| http://www.w3.org/ns/prov#value | - In the drawings, FIG. 2 is an enlarged cross sectional view for the ceramic substrate 12, which shows the state of forming chamfered shapes 24 a at the corners of an outer circumference 22 a defined with the heating surface and the lateral side of the ceramic substrate 12 and at the corner of an outer circumference 22 b defined with the lateral side of opposite to the heating surface and the later
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