| http://www.w3.org/ns/prov#value | - In still another aspect, a metal primer layer is provided, as is a method for using such a primer layer in the formation of a UBM. The primer layer, which may comprise, for example, a layer of TiW with a layer of Cu disposed thereon, facilitates adhesion of the UBM to the SCL. The material or materials used in the primer layer may also serve other functions, such as providing a seed layer or bus m
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