| http://www.w3.org/ns/prov#value | - In an embodiment of the present invention where the carrier gas/precursor vapor/process gas mixture within conduit 273 comprises a hafnium precursor, a process gas such as oxygen, and a carrier gas such as nitrogen, conduit 273 temperatures between about 130??? C. and 160??? C. would prevent both condensation and decomposition of the hafnium/oxygen/nitrogen mixture. [0108] A further aspect of the
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