| http://www.w3.org/ns/prov#value | - In addition, the present invention is a film-forming method of forming a metal-nitride film onto a surface of an object to be processed in a processing container in which a vacuum can be created, the film-forming method comprising: a step of continuously supplying an inert gas into a processing container set at a low film-forming temperature; a step of intermittently supplying a metal-source gas i
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